Capacitive pressure sensors provide high sensitivity as compared to piezoresistive pressure sensors, as their performance is invariant with the temperature. Graw-Hill Book Company, Inc., Kogakusha Company Ltd., Tokyo, 1959, pp. The calculation using equation (7) is formulated for b/a ratio of. capacitance with respect to per unit change in the pressure applied. Capacitance is calculated using the equation (4). Figures 4, 5, 6 and 7 show the plot of the displacement versus applied pressure in MPa for the square, circular. %PDF-1.5 %���� In the model the pressure is varied in terms of MPa. The combination of micromaching techniques of silicon and the advent of high expertise in silicon integrated circuits have paved way for MEMS and Microsystems concept. The sensors modelled have square, circular and rectangular diaphragms, with some fixed area. H�tT�n�0�>�@�J�|�S�66 @�xO�4GM�&v`'.گ)9Ȥ��!y�/�}[XwpW$� hN�Q@�DD1%` ��i�H�"n�۷t8ء'6� The details of the design are given in Table 1. endstream endobj startxref Thin, maximum central deflection. The circular diaphragm shows better capacitance readout compared to the other models, whereas the square and rectangular diaphragm models provide more linear outputs. Rectangular diaphragm doest show the amount of capacitance as the other two, but provides better linearity compared over the range 1MPa to 100MPa, to the other two diaphragm models. The sensors are designed for high pressure sensing, over a range of pressure varying from 1Mpa to 100Mpa. Capacitive pressure sensors are highly accurate and consume minimal power. Circular diaphragm shows better PRCC as compared to other two diaphragm models. Figure 16 shows the PRCC against the applied pressure for the two diaphragm models viz., square and rectangular (golden & normal rectangular diaphragms). The models were subjected to electromechanical analysis with the application of load varying from 1MPa to 100MPa.Three models were subjected to Finite Element Analysis with maximum element size of 117m, minimum element size of 21.9m. Total Capacitance: Capacitance of the model against the pressure applied (Capacitance changes with change in the applied pressure). Here rectangular diaphragm model with, a concept of golden. K. N. Bhat and M. M. Nayak, MEMS Pressure Sensor-An overview of challenges in Technology and Packaging, journal of ISSS, Vol. 2. 2, No. Were the above equation has been formulated for a flexural density, which is given by (3). The capacitance of the sensor is typically around 50 to 100 pF, with the change being a few picofarads. J��_Rd. Keywords MEMS, Capacitive Pressure Sensors, Si<100>, Golden rectangle, Golden ratio. Jeff Melzak and Nelsimar Vandelli, SiC MEMS Pressure Sensors: Technology, Applications and Markets, for PLXmicro. COMSOL/Multiphysics has been used to model and simulate the models. The following parameters are used for the analysis of the designed models. The graph provides the plot for capacitance of the normal rectangular diaphragm with varying diaphragm thickness from 60m to 71m. Of International Conference on Microelectronics, Cicuits and Systems (MICRO-2014). Figure 8 graph of Capacitance v/s Applied Pressure square diaphragm of thickness 63m, gap 19m. Y. Zhang, R. Howver, B. Gogoi and N. Yazdi, A High Ultra-Thin MEMS Capacitive Pressure Sensor, IEEE Transducers11, Beijing, China, June 5-9, 2011, 978-1-4577-0156-6/11. h�bbd``b`.��@� ��$X�A V+�U"�@�2���$$�~��} �H��� �8���Ƞd100Қ�Ϙ� � fX ratio is utilized, which is widely used in image processing applications. Capacitance change results from the movement of a diaphragm element. A change in pressure … Diaphragm Pressure Sensors. Moreover, silicon diaphragm is This change may or may not be linear and is typically on the order of several picofarads out of a total capacitance of 50-100 pF. Department of Electronics & Communication Engineering, Basaveshwar Engineering College, (Affiliated to VTU, Belagavi), Bagalkot-587103, Karnataka, India. The plot presents the capacitance for varying diaphragm thickness from 60m to 71m. A pressure sensor usually acts as a transducer; it generates a signal as a function of the pressure imposed. Capacitive pressure sensors measure changes in electrical capacitance caused by the movement of a diaphragm. Figure 15 graph of Applied Pressure v/s Capacitance of square, golden ratio rectangular, normal rectangular and circular diaphragm, with the gap. ���Z gT��+��m��`x�ұl�B�������0D����N:C��S Ym� It can be observed that the plot show the near linear behaviour for the diaphragm with varying thickness. membrane) instead of a liquid level to measure the difference between an unknown pressure and a reference pressure. D is flexural density same for all models with value of 2.91X10-3. Figure 14 graph of Applied Pressure v/s Capacitance with different thickness of normal rectangular diaphragm, with the gap between electrodes. The gap between the electrodes is kept as 19m. The golden rectangular diaphragm has dimensions of 1000m*620m and normal rectangular diaphragm has dimensions of 950m and 645m. A typical Diaphragm pressure gauge contains a capsule divided by a diaphragm, as shown in the schematic below. Were, b=length of diaphragm, a=width of diaphragm, h=thickness of diaphragm and A=area of the diaphragm (all values are in microns). Here, C- new capacitance, C0-initial capacitance, P-Pressure applied, a-half the length of diaphragm, d-gap between the electrodes, D-flexural density. The two electrodes are of gold material with dimensions of the length, radius and width as mentioned in Table 1. In this paper, we have designed and simulated a capacitive pressure sensor for harsh environment. diaphragm, electrode, followed by dielectric material (air gap), bottom electrode and substrate. If a robust material is used for the substrate of the sensors as well as the packaging material, i.e., fabricating the sensor on the package itself, cost savings for the overall system may accrue. The table shows the type of capacitive pressure sensors useful for measuring different parameters mentioned in the table. It uses diaphragm as one electrode which is movable, with respect to the fixed electrode. 130, Issue 7, July 2011, pp. Rosemount has a line of electronic pressure transmitters using differential capacitance sensors as the pressure sensing element. We present detailed shape-based analyses to compare the performance of metal foil-based capacitive pressure sensors based on the shape of the diaphragm (top electrode). Figure 14 shows the plot of capacitance against applied pressure for the normal rectangular diaphragm. The sensors modelled have square, circular and rectangular diaphragms, with some fixed area. For pressure measurement, diaphragm pressure sensors are preferred to direct-connected gauges of the Bourdon tube type. The paper provides a thorough analysis and discussion on different performance parameters for capacitive pressure sensing, such as the total displacement, capacitance, PRCC (Percentage Relative Change in Capacitance), electrical sensitivity. In capacitive pressure sensor, one of these metal plates is permitted to move in and out so that the capacitance between them changes due to varying distance between the plates. Capacitive Pressure Sensor Interfaces: An Overview 1.1 Capacitive Pressure Sensors 3 1.1.1 Structures of Capacitive Pressure Sensors 5 1.1.2 Existing Challenges 9 1.2 Capacitance Measurement Methods 10 1.2.1 Direct1.2.2 B - 2014 Figure 4 graph of Applied Pressure v/s Total displacement for a square diaphragm of thickness 63m, Fig.ure 5 graph of Applied Pressure v/s Total displacement for a circular diaphragm of thickness 63m, Figure 6 graph of Applied Pressure v/s Total displacement for a golden ratio rectangular diaphragm of thickness 63m, Figure 7 graph of Applied Pressure v/s Total displacement for a normal rectangular diaphragm of thickness 63m. Capacitive pressure sensors with stainless steel diaphragm and substrate Read-out chip Lithographically defined traces Capacitive pressure sensors Figure 1. 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